著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hoang V. Tran and Roger H. French and Douglas J. Adelman,Evaluation of next generation fluids for ArF immersion lithography beyond water,Journal of photopolymer science and technology,09149244,Chiba : The Society of Photopolymer Science and Technology,2007,20,5,729-738,https://cir.nii.ac.jp/crid/1523106604886152448,