著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Koutarou Kawahara and Jun Suda and Tsunenobu Kimoto,Deep Levels Generated by Thermal Oxidation in n-Type 4H-SiC,Applied physics express : APEX,18820778,Tokyo : Japan Society of Applied Physics,2013-05,6,5,051301,https://cir.nii.ac.jp/crid/1523106605303927168,https://doi.org/10.7567/apex.6.051301