著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
T.-T. Tang and Y. Wang and X.-D. Liu,A combined objective lens-energy analyser for electron beam testing of IC,Journal of electron microscopy,00220744,Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press,1998-01,47,1,1-7,https://cir.nii.ac.jp/crid/1523106605309281664,