著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Atsuro Nakano and Takahiro Kozawa and Seiichi Tagawa,Reactivity of Acid Generators for Chemically Amplified Resists with Low-Energy Electrons,"Japanese journal of applied physics. Part 2, Letters & express letters",00214922,Tokyo : Japan Society of Applied Physics,2006,45,4-7,L197-200,https://cir.nii.ac.jp/crid/1523388079620968832,