著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Xiao Dong and Ning Li and Cong Liang,Strong Mid-Infrared Absorption and High Crystallinity of Microstructured Silicon Formed by Femtosecond Laser Irradiation in NF₃ Atmosphere,Applied physics express : APEX,18820778,Tokyo : Japan Society of Applied Physics,2013-08,6,8,081301,https://cir.nii.ac.jp/crid/1523669554850437504,https://doi.org/10.7567/apex.6.081301