Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Takeshi Hatsuzawa and Kouji Toyoda and Yoshihisa Tanimura,A Metrological Electron Microscope System for Microfeatures of Very Large Scale Integrated Circuits,計量研究所報告,03686051,つくば : 工業技術院計量研究所,1990-07,39,3,p491-495,https://cir.nii.ac.jp/crid/1524232504644474496,