Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Ute Kaiser and I.I. Khodos and J. Jinschek,A TEM study of local non-uniformities in epitaxial 2H-AlN films on Si(111)substrate,Journal of electron microscopy,00220744,Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press,1999,48,5,545-554,https://cir.nii.ac.jp/crid/1524232504983452416,