Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
"HOSOKAWA,Terno and HAYASAKA,Toa and YOSHIHARA,Hideo and ISHIHARA,Sunao and KITAYAMA,Toyoki",SOR Lithography : Lithography Technology :,JJAP series,,Japanese Journal of Applied Physics,1989-12-30,3,,72-75,https://cir.nii.ac.jp/crid/1540291245330846464,