著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
"Jin-Zhong YU and MASUI,Norio and YUBA,Yoshihiko and HARA,Tamio and HAMAGAKI,Manabu and AOYAGI,Yoshinobu and GAMO,Kenji and NAMBU,Susumu",Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology :,JJAP series,,Japanese Journal of Applied Physics,1989-12-30,3,,249-253,https://cir.nii.ac.jp/crid/1543668945051380864,