著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
YOSHIOKA N.,"Attenuated phase‐shifting mask with single‐layer absorptive shifter of CrO CrON, MoSiO, and MoSiON film",SPIE Proc.,,,1994,2197,,,https://cir.nii.ac.jp/crid/1570291224115797760,