著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
KARAKI-DOY T.,High-Precision processing System for Thinning of Glass Substrate with Interference Filter Films and Its Characteristics,Sensors and Materials,,,1994,6,5,255,https://cir.nii.ac.jp/crid/1570291224282139008,