Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KIYOTA Yukihiro and UDO Tsutomu and HASHIMOTO Takashi and KODAMA Akihiro and SHIMAMOTO Hiromi and HAYAMI Reiko and OHUE Eiji and WASHIO Katsuyoshi,HCI-Free Selective Epitaxial SiGe Growth by LPCVD for 80-GHz BiCMOS Production,Extended abstracts of the ... Conference on Solid State Devices and Materials,,,2001-09-25,2001,,372-373,https://cir.nii.ac.jp/crid/1570291225232820352,