Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
TAKINO Hideo and ICHINOHE Toshimitsu and TANIMOTO Katsunori and NOMURA Kazushi and KUNIEDA Masanori,Contouring of polished single-crystal silicon plates by wire electrical discharge machining,Precision engineering,01416359,,2007-10-01,31,4,358-363,https://cir.nii.ac.jp/crid/1570291225512166656,