著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
MAKOTO M.,Characterization of Bulk Micromachined Tunneling Tip Integrated with Positioning Actuator,"Technical Digest of Micro Electro Mechanical Syst. (MEMS), 2002",,,2002,,,,https://cir.nii.ac.jp/crid/1570291225543534976,