著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
KISE K,"An Evaluation oh High Acceleration Voltage Electron Beam Writing on X-ray Masks, Dig","Papers, 1997 Int. Microprocesses & Nanotechnology Conf., Nagoya",,,1997,,,,https://cir.nii.ac.jp/crid/1570291225756084480,