Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
PFAHLER J.,"Gas and Liquid Flow in small Channels, Micromechanical sensors, Actuators, and Ssystems",ASME,,,1991,32,,49-60,https://cir.nii.ac.jp/crid/1570291226764594176,