Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) YOSHIMOTO Tomomi and YAMAZAKI Masayoshi and IWATA Tatsuo and SAKATA Toshimichi,A Simplified Fabrication Process of Semiconductor Devices for Education,Proceedings of Hokkaido Tokai University. Science and engineering,09162097,Hokkaido Tokai University,1991-03-20,3,,173-176,https://cir.nii.ac.jp/crid/1570291226874722432,