Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
OHKI R. and HOSHI Y.,ITO films deposition examine with low temperature by sputtering,IEICE technical report. Component parts and materials,,"The Institute of Electronics, Information and Communication Engineers",1998-10-29,98,376,15-21,https://cir.nii.ac.jp/crid/1570291227422775680,