Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
SHIBATA Hideki,Issues and Perspectives in Low-k Dielectric Technology and its Impact on Device Performance,Technical report of IEICE. SDM,,"The Institute of Electronics, Information and Communication Engineers",1996-08-23,96,226,45-50,https://cir.nii.ac.jp/crid/1570291227512654464,