著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) HAMAKAWA Y.,From Bulk Crystalline Age to Multilayered Thin Film Age-A Technological Evolution from Micro-to Macroelectronics,Sensors and Materials,,,1991,3,,9,https://cir.nii.ac.jp/crid/1570572699517927296,