Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) STEINHOGL W.,Comprehensive Study of the Resistivity of Copper Wires with Lateral Dimensions of 100 nm and Smaller,J. Appl. Phys.,,,2005,97,,"""023706-1""-""023706-7""",https://cir.nii.ac.jp/crid/1570572700384247552,