著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
KIKUCHI Hirokazu and YAMADA Yusuke and KIJIMA Hitoshi and FUKUSHIMA Takafumi and KOYANAGI Mitsumasa,Deep Trench Etching for Chip-to-Chip Three-Dimensional Integration,Extended abstracts of the ... Conference on Solid State Devices and Materials,,,2005-09-13,2005,,562-563,https://cir.nii.ac.jp/crid/1570572700671998976,