Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
BOUROUIUA T.,The MEMSNAS Process : Microloading Effect for Micromachining 3-D Structures of Nearly All Shapes,J. Microelectromech. Syst.,,,2004,3,1,1-10,https://cir.nii.ac.jp/crid/1570572700964759424,