Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Sasaki Toru and Enoki Takatomo and Tachikawa Masami and Sugo Mitsuru and Mori Hidefumi,Fabrication of InAlAs/InGaAs MSM Photodetectors on Si substrates,IEICE technical report. Electron devices,,"The Institute of Electronics, Information and Communication Engineers",1993-07-26,93,168,39-44,https://cir.nii.ac.jp/crid/1570572702403218560,