[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon

  • BABA Akiyoshi
    Department of Electrical Engineering,Faculty of Engineering,Kyushu University
  • SADOH Taizoh
    Department of Electronics,Faculty of Engineering,Kyushu University
  • KENJO Atsushi[et al.]
    Department of Electrical Engineering,Faculty of Engineering,Kyushu University

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Details

  • CRID
    1570854176796709248
  • NII Article ID
    110000020153
  • NII Book ID
    AA00732525
  • ISSN
    00236160
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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