Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon
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- BABA Akiyoshi
- Department of Electrical Engineering,Faculty of Engineering,Kyushu University
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- SADOH Taizoh
- Department of Electronics,Faculty of Engineering,Kyushu University
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- KENJO Atsushi[et al.]
- Department of Electrical Engineering,Faculty of Engineering,Kyushu University
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収録刊行物
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- 九州大學工學部紀要
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九州大學工學部紀要 55 (2), 127-138, 1995-06
九州大学
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詳細情報
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- CRID
- 1570854176796709248
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- NII論文ID
- 110000020153
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- NII書誌ID
- AA00732525
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- ISSN
- 00236160
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles