著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) BABA Akiyoshi and SADOH Taizoh and KENJO Atsushi[et al.],Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon,九州大學工學部紀要,00236160,九州大学,1995-06,55,2,127-138,https://cir.nii.ac.jp/crid/1570854176796709248,