Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Okamoto T and Higashi T and Mineoka K and Tanaka T and Kawabata K,Stoichiometry Control of A〓Nx on DC Bias Voltage in RF-DC Coupled Magnetron Sputtering,Proceedings of the Society Conference of IEICE,,"The Institute of Electronics, Information and Communication Engineers",1995-09-05,1995,2,30,https://cir.nii.ac.jp/crid/1570854177405978880,