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Dynamic Mixing Experiment for Oxide Film Formation with ECR Ion Beam(Physics, Process, Instrument & Measurement)

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Abstract

A compact dynamic mixing system equipped with a bucket type ECR ion source was developed for the formation of oxide films. The machine characteristics was tested and modified to be appropriate for the mixing experiment. The ion energy can be varied between 5 to 25keV with sufficient current density for the oxide fillm synthesis. Formation of titanium oxide films were performed by the combination of electron beam evaporation of Ti metals and oxygen ion beam injection onto Si wafers and/or quarts plates. Only rutile type TiO_2 films were obtained by varying the beam energy and the arrive rate of Ti/O.

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Details

  • CRID
    1571135652278820096
  • NII Article ID
    110006486931
  • NII Book ID
    AA00867058
  • ISSN
    03874508
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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