著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Nonogaki Saburo and Imai Akira,High-Resolution Proximity Exposure through a Phase Shifter Mask,Japanese Journal of Applied Physics,,社団法人応用物理学会,1993,32,10,4845-4849,https://cir.nii.ac.jp/crid/1571417127354494336,