Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
ESASHI Masayoshi,MEMS Devices : Progress Towards Practical Applications,IEEJ transactions on electrical and electronic engineering : official journal of the Institute of Electrical Engineering of Japan,19314973,,2009-02-01,4,1,54-55,https://cir.nii.ac.jp/crid/1571698600849662976,