著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
KE F.,A Ruthenium-Based Multimetal-Contact RF MEMS Switch with a Corrugated Diaphragm,J. Microelectromech. Syst.,,,2008,17,,1447-1459,https://cir.nii.ac.jp/crid/1571698601429636608,