著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
ORSHANSKY M.,"Characterization of spatial intrafield gate CD variability, its impact on circuit performance, and spatial mask-level correction",IEEE Trans. Semicond. Manuf.,,,2004,17,1,2-11,https://cir.nii.ac.jp/crid/1571698601694522368,