著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
PARK S. G.,Implementation of HfSiON gate for sub-60nm DRAM dual gate oxide recess channel array transistor (RCAT) and Tungsten gate,"IEDM Tech. Dig., 2004",,,2004,,,,https://cir.nii.ac.jp/crid/1571980075309629952,