著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) SAKATA Minoru,Pb-Based ferroelectric thin film actuator for optical applications,"Proc. of MICRO SYSTEM Technologies'94, 4th Int. Conf. (MST'94), Berlin, Oct.",,,1994,,,,https://cir.nii.ac.jp/crid/1571980075560028544,