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Combinatorial Arc Plasma Deposition of Thin Films

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Journal

Japanese journal of applied physics Pt. 1 Regular papers, brief communications & review papers

Japanese journal of applied physics Pt. 1 Regular papers, brief communications & review papers 45 (4), 2708-2713, 2006-04

IOP Publishing

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Keywords

Details

CRID

1571980075987595392
NII Article ID

40007227498
NII Book ID

AA10457675
ISSN

00214922
DOI

10.1143/jjap.45.2708
NDL BIB ID

7883083
Web Site

http://id.ndl.go.jp/bib/7883083
Text Lang

en
Data Source
- CiNii Articles
- NDL
- Crossref

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