著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) SAKAMOTO Hironori,A new diffusion algorithm during oxidation which can handle both Phosphorus Pile-up and Boron Segregation at Si-SiO2 interface,IEEE,,,1997,,,,https://cir.nii.ac.jp/crid/1572261549965443712,