Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
江刺 正喜,Micro electron field emitter array with focus lenses for multi-electron beam lithography,"TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems",,Institute of Electrical and Electronics Engineers,2003,,2,1295-1298,https://cir.nii.ac.jp/crid/1572261552518214528,