著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
WILLSON C.,Introduction to Microlithography,Am. Chem. Soc. Ser.,,American Chemical Society,1983,219,,88,https://cir.nii.ac.jp/crid/1572543024344109312,