著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sahara Kouji and Ouchi Hideki and Hanabusa Mitsugu,Control of Reaction Mechanism of Photochemical Vapor Deposition of Aluminum Film by Timing of Source Introduction,Japanese Journal of Applied Physics,0021-4922,公益社団法人 応用物理学会,1991,30,7,1545-1548,https://cir.nii.ac.jp/crid/1572543028050847488,