Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
NAKAMURA H.,A superior TiN/TiSi_2 barrier layer by using sputter deposition from a TiN_<0.4> alloy target and subsequent RTN27:010★VLSI Technol. Symp. Dig.,,,,1993,127,,,https://cir.nii.ac.jp/crid/1572824498905865984,