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Characteristics of micro-thermoelectric mass flow sensors with Si3N4/SiO2/Si3N4 thermal isolation membrane

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Journal

Japanese journal of applied physics Pt. 1 Regular papers, brief communications & review papers

Japanese journal of applied physics Pt. 1 Regular papers, brief communications & review papers 46 (12), 7916-7919, 2007-12

IOP Publishing

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Keywords

Details

CRID

1572824499745057920
NII Article ID

40015752605
NII Book ID

AA10457675
ISSN

00214922
DOI

10.1143/jjap.46.7916
NDL BIB ID

9299518
Web Site

http://id.ndl.go.jp/bib/9299518
Text Lang

en
Data Source
- CiNii Articles
- NDL
- Crossref

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