著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
江刺 正喜,MEMS based thin film 2 GHz resonator for CMOS integration,2003 IEEE MTT-S International Microwave Symposium Digest,0149-645X,Institute of Electrical and Electronics Engineers,2003,,3,1797-1800,https://cir.nii.ac.jp/crid/1572824502471636352,