著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
KIM Il-Gweon and BAE Jung-wan and CHOY Jun-Ho and KIM Nam-Sung and KWEON Young-Woo and CHOI Se-Kyoung and KIM Sung-Chul and PARK Joo-Seog and KIM Ji-Byum,Impact of Gate Etch Damage and Profile in High Density DRAM Cell,Extended abstracts of the ... Conference on Solid State Devices and Materials,,,2001-09-25,2001,,26-27,https://cir.nii.ac.jp/crid/1573105974999576192,