Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) LEMMERHIRT D. F.,"An All-Capacitive Sensing Chip for Temperature, Absolute Pressure, and Relative Humidity","Dig. of Tech. Papers, The 12th Int. Conf. on Solid-State Sensors and Actuators (Transducers'03), Boston, USA (2005-6)",,,2005,,,,https://cir.nii.ac.jp/crid/1573105975303150592,