著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
MIYANO J.,Characterization of SiO_2 films by photo-CVD using Xe_2 excimer lamp,Electrochem. Soc. Proc. IEE Japan,,,2003,2003,,603-608,https://cir.nii.ac.jp/crid/1573105975729389824,