Growth Process of Polyhedral Oxide Precipitates in Czochralski Silicon Crystals Annealed at 1100℃
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- SUEOKA Koji
- Sumitomo Metal Ind. Ltd.
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- IKEDA Naoki
- Sumitomo Metal Ind. Ltd.
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- YAMAMOTO Toshiro
- Sumitomo Metal Ind. Ltd.
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- KOBAYASHI Sumio
- Sumitomo Metal Ind. Ltd.
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Journal
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- Japanese journal of applied physics. Pt. 2, Letters
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Japanese journal of applied physics. Pt. 2, Letters 33 (11), L1507-L1510, 1994-11-01
The Japan Society of Applied Physics