著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
SUGIURA Hideo,Doping Profile Control in Si MBE Film with Sb Ion Doping : C-3: CRYSTAL TECHNOLOGY,Japanese journal of applied physics. Supplement,00214922,社団法人応用物理学会,1980-04-30,19,1,641-645,https://cir.nii.ac.jp/crid/1573105977278208896,