著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Shibata Tomohiro and Nanishi Yasushi and Fujimoto Masatomo,Low-Temperature Si Surface Cleaning by Hydrogen Beam with Electron-Cyclotron-Resonance Plasma Excitation,Japanese Journal of Applied Physics,0021-4922,公益社団法人 応用物理学会,1990,29,7,L1181-L1184,https://cir.nii.ac.jp/crid/1573105977988260480,