Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) OHSHIMA T.,Application of phase-shifting mask technology to 0.17-μm-gate GaAs MESFET for ultra high speed IC's,Digests Device Research Conference,,,1994,,,,https://cir.nii.ac.jp/crid/1573387449275482368,