著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tatsumi Toru and Aizaki Naoaki and Tsuya Hideki,Advanced Techniques to Decrease Defect Density in Molecular Beam Epitaxial Silicon Films,Japanese Journal of Applied Physics,,社団法人応用物理学会,1985,24,4,L227-L229,https://cir.nii.ac.jp/crid/1573387452127149056,